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Hlavní funkce pro LEXT OLS3100 |
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 3D pozorování s vysokým rozlišením
a měření v reálném čase
Velmi spolehlivé měření profilu
jemných povrchů
Rychlé a přesné ovládání
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Simultaneous 3D and 'true colour' image acquisition
A unique feature of LEXT is its ability to image samples in 3D and 'true colour' by combination of the laser image with the full colour brightfield image in the system computer. Additional utilisation of DIC allows for identification of minute level differences on the surface of a specimen. The range of contrast methods is completed by darkfield for detection of scratches and cracks. |
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Outstanding resolving power
The 408nm laser diode is combined with optics specifically designed for operation at this wavelength to optimise image quality and limit aberrations. The resolving power is enhanced by confocal optics featuring an additional, optimised circular pinhole and a highspeed XY scanner developed from Olympus MEMS technology. The result is world-leading plane resolution which clearly resolves patterns of 0.12µm line-width and profiles of 0.01µm height. The respective measurement repeatability is within 0.02µm (3sigma) horizontally and 0.052µm (3sigma) in direction of the z-axis. |
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